Quantitative Analysis of SnO2 Film Materials and Doping Research Based on Density Functional Theory
Abstract
In this paper, the structure of tin dioxide material is analyzed by MS software, XPS and AFM. The XPS analysis results of SnO2 film structure show that:O/Sn composition ratio of tin oxide film is affected by the ratio of argon to oxygen, treating temperature and sputtering time, Annealing treatment and supplementation of O2 can increase the content of adsorbed oxygen on the surface. Analysis of the structure of the film by AFM shows annealing can make tin oxide film crystal bloom and improve surface defects. The doping of Pd in SnO2 components can increase the conductivity to explain, and it also provides a reference for the experiment.