Numerical Simulation of Glow Discharge Plasma in Anode Barrel

Abstract

Glow discharge cold plasma sputtering denudes the sample surface, so the plasma concentration near the sample surface directly affects the flatness of the pits on the denuded surface during glow discharge. In this paper, the plasma field in the Anode barrel of glow discharge device is studied by using commercial numerical simulation software COMSOL multiphysics to obtain the distribution of plasma, Firstly, the influence of different wall thickness on the plasma field is studied. It is obtained that the larger the wall thickness is, the higher the electron density is, but the distribution law is relatively consistent; Secondly, the plasma field under different pressures is studied. It is found that the higher the pressure is, the higher the electron density is, and the same distribution law changes little.